A General Harmonic Rule Controller for Run-to-Run Process Control
نویسندگان
چکیده
منابع مشابه
Nonlinear Run-to-Run Controller for Semiconductor Manufacturing
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ژورنال
عنوان ژورنال: IEEE Transactions on Semiconductor Manufacturing
سال: 2009
ISSN: 0894-6507
DOI: 10.1109/tsm.2009.2017627